Inventor
CHANG CHIH-FU
TW23 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHIH-FU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS10062603B2Aug 28, 2018
Air-gap scheme for BEOL process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9449811B2Sep 20, 2016
Air-gap scheme for BEOL process
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9209304B2Dec 8, 2015
N/P MOS FinFET performance enhancement by specific orientation surface
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12424537B2Sep 23, 2025
Interconnect structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US9318371B2Apr 19, 2016
Shallow trench isolation structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US10153355B2Dec 11, 2018
Semiconductor mixed gate structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9978744B2May 22, 2018
Resistor and metal-insulator-metal capacitor structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9099439B2Aug 4, 2015
Semiconductor device with silicide cap
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10686030B2Jun 16, 2020
Resistor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9768243B2Sep 19, 2017
Structure of resistor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US12293918B2May 6, 2025
Semiconductor structure including discharge structures and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
TAIWAN SEMICONDUCTOR MFG
5 patentsUS6660630B1Dec 9, 2003
Method for forming a tapered dual damascene via portion with improved performance
TAIWAN SEMICONDUCTOR MFG82 citations97
US6642153B1Nov 4, 2003
Method for avoiding unetched polymer residue in anisotropically etched semiconductor features
TAIWAN SEMICONDUCTOR MFG25 citations92
US8008158B2Aug 30, 2011
Dopant implantation method using multi-step implants
TAIWAN SEMICONDUCTOR MFG17 citations79
US9362269B2Jun 7, 2016
Resistor and metal-insulator-metal capacitor structure and method
TAIWAN SEMICONDUCTOR MFG0 citations51
US7176081B2Feb 13, 2007
Low temperature method for metal deposition
TAIWAN SEMICONDUCTOR MFG0 citations51