Inventor
SAI CHOSHOKU
JP10 patents
Patents
10 patentsUS7443619B2Oct 28, 2008
Optical element holding apparatus, exposure apparatus and device manufacturing method
CANON KK22 citations92
US7232257B2Jun 19, 2007
Hydrostatic bearing and stage apparatus using same
CANON KK11 citations82
US6658083B2Dec 2, 2003
Weight compensation apparatus, stage apparatus using the same, and exposure apparatus
CANON KK15 citations82
US7771065B2Aug 10, 2010
Optical unit and exposure apparatus having the same
CANON KK7 citations73
US7207720B2Apr 24, 2007
Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method
CANON KK8 citations72
US7453623B2Nov 18, 2008
Reflecting mirror and exposure apparatus using the same
CANON KK2 citations62
US10884236B2Jan 5, 2021
Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article
CANON KK1 citations60
US9557560B2Jan 31, 2017
Mirror unit and exposure apparatus
CANON KK0 citations50
US9568729B2Feb 14, 2017
Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article
CANON KK0 citations39
US9465294B2Oct 11, 2016
Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article
CANON KK0 citations39