Inventor
MITCHELL ROBERT J
US28 patents
⚠️ This page may combine multiple inventors who share the name “MITCHELL ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
9 patentsUS6740894B1May 25, 2004
Adjustable implantation angle workpiece support structure for an ion beam implanter utilizing a linear scan motor
AXCELIS TECH INC28 citations92
US7010388B2Mar 7, 2006
Work-piece treatment system having load lock and buffer
AXCELIS TECH INC35 citations91
US6794664B1Sep 21, 2004
Umbilical cord facilities connection for an ion beam implanter
AXCELIS TECH INC23 citations90
US6231054B1May 15, 2001
Elastomeric sliding seal for vacuum bellows
AXCELIS TECH INC27 citations89
US6583428B1Jun 24, 2003
Apparatus for the backside gas cooling of a wafer in a batch ion implantation system
AXCELIS TECH INC28 citations88
US7949425B2May 24, 2011
High throughput wafer notch aligner
AXCELIS TECH INC18 citations84
US6580082B1Jun 17, 2003
System and method for delivering cooling gas from atmospheric pressure to a high vacuum through a rotating seal in a batch ion implanter
AXCELIS TECH INC13 citations84
US7897944B2Mar 1, 2011
Method and apparatus for measurement of beam angle in ion implantation
AXCELIS TECH INC4 citations63
US10832926B2Nov 10, 2020
High throughput serial wafer handling end station
AXCELIS TECH INC0 citations41
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
5 patentsUS10152033B2Dec 11, 2018
Proportional integral derivative control incorporating multiple actuators
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations67
US10157763B2Dec 18, 2018
High throughput substrate handling endstation and sequence
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51
US9415508B1Aug 16, 2016
Multi-link substrate scanning device
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51
US9484183B2Nov 1, 2016
Linkage conduit for vacuum chamber applications
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations49
US9891599B2Feb 13, 2018
Proportional integral derivative control incorporating multiple actuators
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations46
VARIAN SEMICONDUCTOR EQUIPMENT
4 patentsUS7816153B2Oct 19, 2010
Method and apparatus for producing a dislocation-free crystalline sheet
VARIAN SEMICONDUCTOR EQUIPMENT8 citations83
US8020398B2Sep 20, 2011
Fluid delivery mechanism for vacuum wafer processing system
VARIAN SEMICONDUCTOR EQUIPMENT2 citations62
US8698108B1Apr 15, 2014
Ion beam measurement system and method
VARIAN SEMICONDUCTOR EQUIPMENT1 citations46
US8939451B2Jan 27, 2015
Floating high vacuum seal cartridge
VARIAN SEMICONDUCTOR EQUIPMENT0 citations33
APPLIED MATERIALS INC
3 patentsUS6100536AAug 8, 2000
Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation
APPLIED MATERIALS INC51 citations92
US10971327B1Apr 6, 2021
Cryogenic heat transfer system
APPLIED MATERIALS INC2 citations73
US11217433B2Jan 4, 2022
Rotary union with mechanical seal assembly
APPLIED MATERIALS INC0 citations46
MITCHELL ROBERT J
3 patentsUS8083872B2Dec 27, 2011
Method of heat treating a superalloy component and an alloy component
MITCHELL ROBERT J11 citations79
US8703045B2Apr 22, 2014
Method of manufacturing a multiple composition component
MITCHELL ROBERT J9 citations76
US8323424B2Dec 4, 2012
Alloy component including a fine grain structure, a coarse grain structure and a transitional structure
MITCHELL ROBERT J2 citations56