Inventor · disambiguated record
Mark Carruthers
Also filed as: CARRUTHERS MARK · CARRUTHERS MARK I · CARRUTHERS MARK IAN
5 granted patents·2 citations·filing 2010–2019
63Inventor score
Top patents by PatentIndex Score
5 records- 0167US10309014B2Method of cleaning a plasma processing deviceSPTS TECHNOLOGIES LTD·Filed 2017·Granted Jun 4, 2019·1 cites·21 claims
- 0260US9165762B2Method of depositing silicone dioxide filmsSPTS TECHNOLOGIES LTD·Filed 2013·Granted Oct 20, 2015·1 cites·7 claims
- 0347US11217442B2Method of depositing a SiN filmSPTS TECHNOLOGIES LTD·Filed 2019·Granted Jan 4, 2022·0 cites·20 claims
- 0440US9783886B2PE-CVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2016·Granted Oct 10, 2017·0 cites·13 claims
- 0529US8337675B2Method of plasma vapour depositionCARRUTHERS MARK IAN·Filed 2010·Granted Dec 25, 2012·0 cites·9 claims
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