Inventor
OCHI SYUTA
JP4 patents
Patents
4 patentsUS11848170B2Dec 19, 2023
Ion generator and ion implanter
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD2 citations66
US11380512B2Jul 5, 2022
Ion generator and ion implanter
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD3 citations66
US12243708B2Mar 4, 2025
Ion generator and ion implanter
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD0 citations55
US10249477B2Apr 2, 2019
Ion implanter and ion implantation method
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD0 citations36