P

Inventor

MUCHOW JOERG

DE55 patents
⚠️ This page may combine multiple inventors who share the name “MUCHOW JOERG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOSCH GMBH ROBERT

38 patents
US5616514AApr 1, 1997

Method of fabricating a micromechanical sensor

BOSCH GMBH ROBERT109 citations98
US6318175B1Nov 20, 2001

Micromechanical sensor and method for the manufacture thereof

BOSCH GMBH ROBERT76 citations95
US5216273AJun 1, 1993

Microvalve of multilayer silicon construction

BOSCH GMBH ROBERT103 citations95
US6076404AJun 20, 2000

Micromechanical sensor including a single-crystal silicon support

BOSCH GMBH ROBERT21 citations92
US7918136B2Apr 5, 2011

Micromechanical sensor element

BOSCH GMBH ROBERT10 citations84
US7055392B2Jun 6, 2006

Micromechanical pressure sensor

BOSCH GMBH ROBERT11 citations82
US6204086B1Mar 20, 2001

Method for manufacturing semiconductor components having micromechanical structures

BOSCH GMBH ROBERT9 citations74
US6559661B1May 6, 2003

Circuit configuration for compensating the temperature non-linearity of the characteristic curves of the piezoresistive measuring resistors connected in a bridge circuit

BOSCH GMBH ROBERT11 citations73
US5242533ASep 7, 1993

Method of structuring a semiconductor chip

BOSCH GMBH ROBERT17 citations73
US11307404B2Apr 19, 2022

Micromechanical micromirror array and corresponding operating method

BOSCH GMBH ROBERT6 citations72
US9593013B2Mar 14, 2017

Mechanical component, mechanical system, and method for operating a mechanical component

BOSCH GMBH ROBERT4 citations68
US7343806B2Mar 18, 2008

Pressure sensor featuring pressure loading of the fastening element

BOSCH GMBH ROBERT5 citations63
US7252008B2Aug 7, 2007

Micromechanical piezoresistive pressure sensor device

BOSCH GMBH ROBERT5 citations63
US11124412B2Sep 21, 2021

Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure

BOSCH GMBH ROBERT0 citations62
US10488650B2Nov 26, 2019

Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

BOSCH GMBH ROBERT1 citations62
US7647832B2Jan 19, 2010

Micromechanical device and method for producing a micromechanical device

BOSCH GMBH ROBERT6 citations61
US10989913B2Apr 27, 2021

Micromechanical component and method for producing a micromechanical component

BOSCH GMBH ROBERT0 citations59
US6782756B2Aug 31, 2004

Micromechanical component and equalization method

BOSCH GMBH ROBERT2 citations58
US11623860B2Apr 11, 2023

Interposer substrate, MEMS device and corresponding manufacturing method

BOSCH GMBH ROBERT0 citations57
US9618740B2Apr 11, 2017

Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device

BOSCH GMBH ROBERT0 citations51
US8344831B2Jan 1, 2013

Magnetic yoke, micromechanical component and method for producing a magnetic yoke and a micromechanical component

BOSCH GMBH ROBERT1 citations51
US7279759B2Oct 9, 2007

Membrane sensor

BOSCH GMBH ROBERT0 citations51
US11066295B2Jul 20, 2021

Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis

BOSCH GMBH ROBERT0 citations50
US10222609B2Mar 5, 2019

Micromirror arrangement and projection device

BOSCH GMBH ROBERT0 citations50
US10001643B2Jun 19, 2018

Micromirror device and projection device

BOSCH GMBH ROBERT0 citations50
US9885866B2Feb 6, 2018

Mirror system and projection device

BOSCH GMBH ROBERT0 citations50
US9764945B2Sep 19, 2017

Micromechanical component and corresponding test method for a micromechanical component

BOSCH GMBH ROBERT0 citations49
US10866407B2Dec 15, 2020

Micromechanical component and method for producing a micromechanical component

BOSCH GMBH ROBERT0 citations48
US10737930B2Aug 11, 2020

Micromechanical spring device and method for manufacturing a micromechanical spring device

BOSCH GMBH ROBERT0 citations46
US11940618B2Mar 26, 2024

Micromechanical component and method for producing a micromechanical component

BOSCH GMBH ROBERT0 citations44
US10871646B2Dec 22, 2020

Micromirror device and method for operating a micromirror device

BOSCH GMBH ROBERT0 citations42
US10627617B2Apr 21, 2020

Micromechanical constituent and method for adjusting an adjustable element

BOSCH GMBH ROBERT0 citations41
US10696542B2Jun 30, 2020

Micromechanical component and method for producing a micromechanical component

BOSCH GMBH ROBERT0 citations40
US10175473B2Jan 8, 2019

Micromirror array and method for the manufacture thereof

BOSCH GMBH ROBERT0 citations40
US9725311B2Aug 8, 2017

Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting

BOSCH GMBH ROBERT0 citations40
US10775610B2Sep 15, 2020

Micromechanical actuator device and method for tilting a micromechanical actuator device

BOSCH GMBH ROBERT0 citations39
US9979269B2May 22, 2018

Micromechanical component and method for producing a micromechanical component

BOSCH GMBH ROBERT0 citations39
US10589988B2Mar 17, 2020

Mechanical component and manufacturing method for a mechanical component

BOSCH GMBH ROBERT0 citations38

PINTER STEFAN

4 patents

PIRK TJALF

3 patents

BUCK THOMAS

1 patent

MUCHOW JOERG

1 patent

ARMBRUSTER SIMON

1 patent

FIESS REINHOLD

1 patent

LINDENKREUZ STEFFI

1 patent

Showing the top 50 of 55 patents by PatentIndex Score.