Inventor
MUCHOW JOERG
DE55 patents
⚠️ This page may combine multiple inventors who share the name “MUCHOW JOERG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
38 patentsUS5616514AApr 1, 1997
Method of fabricating a micromechanical sensor
BOSCH GMBH ROBERT109 citations98
US6318175B1Nov 20, 2001
Micromechanical sensor and method for the manufacture thereof
BOSCH GMBH ROBERT76 citations95
US5216273AJun 1, 1993
Microvalve of multilayer silicon construction
BOSCH GMBH ROBERT103 citations95
US6076404AJun 20, 2000
Micromechanical sensor including a single-crystal silicon support
BOSCH GMBH ROBERT21 citations92
US7918136B2Apr 5, 2011
Micromechanical sensor element
BOSCH GMBH ROBERT10 citations84
US7055392B2Jun 6, 2006
Micromechanical pressure sensor
BOSCH GMBH ROBERT11 citations82
US6204086B1Mar 20, 2001
Method for manufacturing semiconductor components having micromechanical structures
BOSCH GMBH ROBERT9 citations74
US6559661B1May 6, 2003
Circuit configuration for compensating the temperature non-linearity of the characteristic curves of the piezoresistive measuring resistors connected in a bridge circuit
BOSCH GMBH ROBERT11 citations73
US5242533ASep 7, 1993
Method of structuring a semiconductor chip
BOSCH GMBH ROBERT17 citations73
US11307404B2Apr 19, 2022
Micromechanical micromirror array and corresponding operating method
BOSCH GMBH ROBERT6 citations72
US9593013B2Mar 14, 2017
Mechanical component, mechanical system, and method for operating a mechanical component
BOSCH GMBH ROBERT4 citations68
US7343806B2Mar 18, 2008
Pressure sensor featuring pressure loading of the fastening element
BOSCH GMBH ROBERT5 citations63
US7252008B2Aug 7, 2007
Micromechanical piezoresistive pressure sensor device
BOSCH GMBH ROBERT5 citations63
US11124412B2Sep 21, 2021
Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
BOSCH GMBH ROBERT0 citations62
US10488650B2Nov 26, 2019
Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another
BOSCH GMBH ROBERT1 citations62
US7647832B2Jan 19, 2010
Micromechanical device and method for producing a micromechanical device
BOSCH GMBH ROBERT6 citations61
US10989913B2Apr 27, 2021
Micromechanical component and method for producing a micromechanical component
BOSCH GMBH ROBERT0 citations59
US6782756B2Aug 31, 2004
Micromechanical component and equalization method
BOSCH GMBH ROBERT2 citations58
US11623860B2Apr 11, 2023
Interposer substrate, MEMS device and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations57
US9618740B2Apr 11, 2017
Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device
BOSCH GMBH ROBERT0 citations51
US8344831B2Jan 1, 2013
Magnetic yoke, micromechanical component and method for producing a magnetic yoke and a micromechanical component
BOSCH GMBH ROBERT1 citations51
US7279759B2Oct 9, 2007
Membrane sensor
BOSCH GMBH ROBERT0 citations51
US11066295B2Jul 20, 2021
Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
BOSCH GMBH ROBERT0 citations50
US10222609B2Mar 5, 2019
Micromirror arrangement and projection device
BOSCH GMBH ROBERT0 citations50
US10001643B2Jun 19, 2018
Micromirror device and projection device
BOSCH GMBH ROBERT0 citations50
US9885866B2Feb 6, 2018
Mirror system and projection device
BOSCH GMBH ROBERT0 citations50
US9764945B2Sep 19, 2017
Micromechanical component and corresponding test method for a micromechanical component
BOSCH GMBH ROBERT0 citations49
US10866407B2Dec 15, 2020
Micromechanical component and method for producing a micromechanical component
BOSCH GMBH ROBERT0 citations48
US10737930B2Aug 11, 2020
Micromechanical spring device and method for manufacturing a micromechanical spring device
BOSCH GMBH ROBERT0 citations46
US11940618B2Mar 26, 2024
Micromechanical component and method for producing a micromechanical component
BOSCH GMBH ROBERT0 citations44
US10871646B2Dec 22, 2020
Micromirror device and method for operating a micromirror device
BOSCH GMBH ROBERT0 citations42
US10627617B2Apr 21, 2020
Micromechanical constituent and method for adjusting an adjustable element
BOSCH GMBH ROBERT0 citations41
US10696542B2Jun 30, 2020
Micromechanical component and method for producing a micromechanical component
BOSCH GMBH ROBERT0 citations40
US10175473B2Jan 8, 2019
Micromirror array and method for the manufacture thereof
BOSCH GMBH ROBERT0 citations40
US9725311B2Aug 8, 2017
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting
BOSCH GMBH ROBERT0 citations40
US10775610B2Sep 15, 2020
Micromechanical actuator device and method for tilting a micromechanical actuator device
BOSCH GMBH ROBERT0 citations39
US9979269B2May 22, 2018
Micromechanical component and method for producing a micromechanical component
BOSCH GMBH ROBERT0 citations39
US10589988B2Mar 17, 2020
Mechanical component and manufacturing method for a mechanical component
BOSCH GMBH ROBERT0 citations38
PINTER STEFAN
4 patentsUS9791663B2Oct 17, 2017
Magnetically drivable micromirror
PINTER STEFAN2 citations72
US10690906B2Jun 23, 2020
Magnetic actuator
PINTER STEFAN1 citations62
US8896897B2Nov 25, 2014
Micromechanical component and a method for operating a micromechanical component
PINTER STEFAN3 citations61
US8462415B2Jun 11, 2013
Connecting structure for micromechanical oscillating devices
PINTER STEFAN0 citations39
PIRK TJALF
3 patentsUS8847336B2Sep 30, 2014
Micromechanical component having an inclined structure and corresponding manufacturing method
PIRK TJALF2 citations61
US8581470B2Nov 12, 2013
Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component
PIRK TJALF2 citations61
US9195054B2Nov 24, 2015
Cascaded micromechanical actuator structure
PIRK TJALF0 citations40
BUCK THOMAS
1 patentMUCHOW JOERG
1 patentARMBRUSTER SIMON
1 patentFIESS REINHOLD
1 patentLINDENKREUZ STEFFI
1 patentShowing the top 50 of 55 patents by PatentIndex Score.