Inventor
JAIN KANTILAL
US11 patents
⚠️ This page may combine multiple inventors who share the name “JAIN KANTILAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS4516832AMay 14, 1985
Apparatus for transformation of a collimated beam into a source of _required shape and numerical aperture
IBM38 citations92
US4458994AJul 10, 1984
High resolution optical lithography method and apparatus having excimer laser light source and stimulated Raman shifting
IBM45 citations92
US4547044AOct 15, 1985
Beam-folding wedge tunnel
IBM15 citations73
US4444456AApr 24, 1984
Holographic method and apparatus for transformation of a light beam into a line source of required curvature and finite numerical aperture
IBM16 citations73
US4521087AJun 4, 1985
Optical system with diffuser for transformation of a collimated beam into a self-luminous arc with required curvature and numerical aperture
IBM15 citations68
JAIN KANTILAL
4 patentsUS5059013AOct 22, 1991
Illumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical aperture
JAIN KANTILAL159 citations97
US4924257AMay 8, 1990
Scan and repeat high resolution projection lithography system
JAIN KANTILAL266 citations97
US4881231ANov 14, 1989
Frequency-stabilized line-narrowed excimer laser source system for high resolution lithography
JAIN KANTILAL70 citations95
US4991962AFeb 12, 1991
High precision alignment system for microlithography
JAIN KANTILAL32 citations91