Inventor
YOUNG LYDIA J
US13 patents
⚠️ This page may combine multiple inventors who share the name “YOUNG LYDIA J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PERKIN ELMER CORP
6 patentsUS4885472ADec 5, 1989
Silicon grid as a reference and calibration standard in a particle beam lithography system
PERKIN ELMER CORP35 citations92
US4818838AApr 4, 1989
Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems
PERKIN ELMER CORP42 citations92
US4837443AJun 6, 1989
Guard ring for a differentially pumped seal apparatus
PERKIN ELMER CORP26 citations90
US4956024ASep 11, 1990
Non-contacting method of cleaning surfaces with a planoar gas bearing
PERKIN ELMER CORP14 citations71
US4792688ADec 20, 1988
Differentially pumped seal apparatus
PERKIN ELMER CORP6 citations62
US4966787AOct 30, 1990
Method of creating isolated plates on the inside surface of a metallized substrate
PERKIN ELMER CORP1 citations51
ETEC SYSTEMS INC
3 patentsUS5012104AApr 30, 1991
Thermally stable magnetic deflection assembly and method of making same
ETEC SYSTEMS INC21 citations81
US5838006ANov 17, 1998
Conical baffle for reducing charging drift in a particle beam system
ETEC SYSTEMS INC16 citations73
US5136166AAug 4, 1992
Temperature stable magnetic deflection assembly
ETEC SYSTEMS INC13 citations73