Inventor
AOKI KAZUTSUGU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “AOKI KAZUTSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6111225AAug 29, 2000
Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures
TOKYO ELECTRON LTD181 citations97
US5938850AAug 17, 1999
Single wafer heat treatment apparatus
TOKYO ELECTRON LTD57 citations95
US6121579ASep 19, 2000
Heating apparatus, and processing apparatus
TOKYO ELECTRON LTD81 citations94
US5352902AOct 4, 1994
Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters
TOKYO ELECTRON LTD38 citations91
US7169283B2Jan 30, 2007
Anodization device and anodization method
TOKYO ELECTRON LTD3 citations62
US7118663B2Oct 10, 2006
Anodic oxidizer, anodic oxidation method
TOKYO ELECTRON LTD1 citations51