Inventor

LEE MYUNGJUN

KR32 patents

⚠️ This page may combine multiple inventors who share the name “LEE MYUNGJUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE MYUNGJUN

SAMSUNG ELECTRONICS CO LTD

Semiconductor measurement apparatus

Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method

Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method

Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods

Pupil image measuring device and method

Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method

Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM

Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method

Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM

Through-focus image-based metrology device, operation method thereof, and computing device for executing the operation

Focus control method for spectroscopic measuring apparatus, inspection method for semiconductor device, and spectroscopic measuring apparatus for performing the same

Semiconductor inspection apparatus

Super-resolution holographic microscope

Inspection apparatus and method based on coherent diffraction imaging (CDI)

Substrate inspection apparatus and substrate inspection method

Semiconductor measurement apparatus

Holographic microscope and manufacturing method of semiconductor device using the same

Imaging ellipsometer and method of measuring an overlay error using the same

Fluorescence microscopy metrology system and method of operating fluorescence microscopy metrology system

Scanning electron microscope device, semiconductor manufacturing device, and method of controlling semiconductor manufacturing device

KLA TENCOR CORP

Systems and methods for fabricating metrology targets with sub-resolution features

Metrology using overlay and yield critical patterns

System and method for fabricating metrology targets oriented with an angle rotated with respect to device features

Process compatibility improvement by fill factor modulation

Process-sensitive metrology systems and methods

Systems and methods for focus-sensitive metrology targets

LEE SEONGJOON

Lithium rechargeable battery

Secondary battery and circuit board assembly suitable for secondary battery

LEE MYUNGJUN

Diesel engine piston

KLA CORP

Metrology target design for tilted device designs

GLOBALFOUNDRIES INC

Metal segments as landing pads and local interconnects in an IC device

SAMSUNG SDI CO LTD

External case for secondary batteries and secondary battery using the external case