Inventor
AZUMA TSUKASA
JP31 patents
⚠️ This page may combine multiple inventors who share the name “AZUMA TSUKASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
13 patentsUS5879853AMar 9, 1999
Top antireflective coating material and its process for DUV and VUV lithography systems
TOSHIBA KK100 citations98
US5998100ADec 7, 1999
Fabrication process using a multi-layer antireflective layer
TOSHIBA KK89 citations96
US5759746AJun 2, 1998
Fabrication process using a thin resist
TOSHIBA KK75 citations96
US6051369AApr 18, 2000
Lithography process using one or more anti-reflective coating films and fabrication process using the lithography process
TOSHIBA KK25 citations92
US6576375B1Jun 10, 2003
Photomask
TOSHIBA KK24 citations90
US6096484AAug 1, 2000
Pattern forming method using chemically amplified resist and apparatus for treating chemically amplified resist
TOSHIBA KK16 citations84
US5879863AMar 9, 1999
Pattern forming method
TOSHIBA KK12 citations74
US6846750B1Jan 25, 2005
High precision pattern forming method of manufacturing a semiconductor device
TOSHIBA KK9 citations73
US6279502B1Aug 28, 2001
Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device
TOSHIBA KK3 citations63
US5866303AFeb 2, 1999
Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device
TOSHIBA KK1 citations52
US9291908B2Mar 22, 2016
Method of forming pattern and laminate
TOSHIBA KK0 citations51
US9040123B2May 26, 2015
Pattern formation method
TOSHIBA KK0 citations50
US8980755B2Mar 17, 2015
Method of pattern formation
TOSHIBA KK0 citations50
JAPAN STEEL WORKS LTD
6 patentsUS5716468AFeb 10, 1998
Process for producing high-and low-pressure integral-type turbine rotor
JAPAN STEEL WORKS LTD21 citations90
US5487082AJan 23, 1996
Electrode for electroslag remelting and process of producing alloy using the same
JAPAN STEEL WORKS LTD17 citations79
US5560788AOct 1, 1996
Heat resisting steels
JAPAN STEEL WORKS LTD10 citations73
US5524019AJun 4, 1996
Electrode for electroslag remelting and process of producing alloy using the same
JAPAN STEEL WORKS LTD10 citations70
US5444732AAug 22, 1995
Electrode for electroslag remelting and process of producing alloy using the same
JAPAN STEEL WORKS LTD8 citations70
US7820098B2Oct 26, 2010
High Cr ferritic heat resistance steel
JAPAN STEEL WORKS LTD2 citations60