Inventor
PARADIS DOUGLAS E
US7 patents
Patents
7 patentsUS5841543ANov 24, 1998
Method and apparatus for verifying the presence of a material applied to a substrate
TEXAS INSTRUMENTS INC100 citations97
US5551165ASep 3, 1996
Enhanced cleansing process for wafer handling implements
TEXAS INSTRUMENTS INC56 citations92
US5978078ANov 2, 1999
System and method for detecting particles on substrate-supporting chucks of photolithography equipment
TEXAS INSTRUMENTS INC31 citations90
US5839455ANov 24, 1998
Enhanced high pressure cleansing system for wafer handling implements
TEXAS INSTRUMENTS INC24 citations89
US5958517ASep 28, 1999
System and method for cleaning nozzle delivering spin-on-glass to substrate
TEXAS INSTRUMENTS INC17 citations79
US6067163AMay 23, 2000
Automated substrate pattern recognition system
TEXAS INSTRUMENTS INC14 citations73
US6054367AApr 25, 2000
Ion implant of the moat encroachment region of a LOCOS field isolation to increase the radiation hardness
TEXAS INSTRUMENTS INC9 citations68