Inventor
SASABE SHUNJI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SASABE SHUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS6057081AMay 2, 2000
Process for manufacturing semiconductor integrated circuit device
HITACHI LTD50 citations96
US5060045AOct 22, 1991
Semiconductor integrated circuit device and method of manufacturing the same
HITACHI LTD80 citations96
US5021114AJun 4, 1991
Apparatus for treating material by using plasma
HITACHI LTD67 citations96
US4717462AJan 5, 1988
Sputtering apparatus
HITACHI LTD102 citations95
US6497992B1Dec 24, 2002
Process for manufacturing semiconductor integrated circuit device
HITACHI LTD32 citations92
US5235399AAug 10, 1993
Temperature measuring apparatus utilizing radiation
HITACHI LTD20 citations79