Inventor
GOTOH HIDETO
US8 patents
⚠️ This page may combine multiple inventors who share the name “GOTOH HIDETO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6514352B2Feb 4, 2003
Cleaning method using an oxidizing agent, chelating agent and fluorine compound
TOKYO ELECTRON LTD43 citations91
US6478035B1Nov 12, 2002
Cleaning device, cleaning system, treating device and cleaning method
TOKYO ELECTRON LTD46 citations91
US6875288B2Apr 5, 2005
Cleaning agent and cleaning method
TOKYO ELECTRON LTD6 citations61
TEXAS INSTRUMENTS INC
3 patentsUS5650041AJul 22, 1997
Semiconductor device fabrication method
TEXAS INSTRUMENTS INC43 citations86
US6462005B1Oct 8, 2002
Cleaning agent for a semiconductor device and a method of manufacturing a semiconductor device
TEXAS INSTRUMENTS INC16 citations83
US5885901AMar 23, 1999
Rinsing solution after resist stripping process and method for manufacturing semiconductor device
TEXAS INSTRUMENTS INC10 citations73