Inventor
TZENG HUEY M
US5 patents
⚠️ This page may combine multiple inventors who share the name “TZENG HUEY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXTRON CORP
2 patentsUS6010538AJan 4, 2000
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
LUXTRON CORP216 citations95
US6028669AFeb 22, 2000
Signal processing for in situ monitoring of the formation or removal of a transparent layer
LUXTRON CORP57 citations94