Inventor
ISEKI IZURU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “ISEKI IZURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
6 patentsUS4925388AMay 15, 1990
Apparatus for heat treating substrates capable of quick cooling
DAINIPPON SCREEN MFG357 citations95
US6174371B1Jan 16, 2001
Substrate treating method and apparatus
DAINIPPON SCREEN MFG61 citations94
US6893805B2May 17, 2005
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG20 citations91
US6074515AJun 13, 2000
Apparatus for processing substrates
DAINIPPON SCREEN MFG43 citations91
US6926057B2Aug 9, 2005
Thin film forming apparatus and thin film forming method
DAINIPPON SCREEN MFG9 citations72
US6918421B2Jul 19, 2005
Thin film forming apparatus and thin film forming method
DAINIPPON SCREEN MFG2 citations61