Inventor

WANG JAMES CHANG

US2 patents

Patents

2 patents

US6537918B2Mar 25, 2003

Method for etching silicon oxynitride and dielectric antireflection coatings

APPLIED MATERIALS INC22 citations90

US6291356B1Sep 18, 2001

Method for etching silicon oxynitride and dielectric antireflection coatings

APPLIED MATERIALS INC18 citations90