Inventor

TSAI CHIN-CHI

US4 patents

⚠️ This page may combine multiple inventors who share the name “TSAI CHIN-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MARTIN MARIETTA ENERGY SYSTEMS

2 patents

US5292370AMar 8, 1994

Coupled microwave ECR and radio-frequency plasma source for plasma processing

MARTIN MARIETTA ENERGY SYSTEMS310 citations94

US5032202AJul 16, 1991

Plasma generating apparatus for large area plasma processing

MARTIN MARIETTA ENERGY SYSTEMS182 citations93

UT BATTELLE LLC

1 patent

US6568362B2May 27, 2003

Rotating arc spark plug

UT BATTELLE LLC20 citations90

BWXT Y 12 LLC

1 patent

US6562418B2May 13, 2003

Microwave processing of pressed boron powders for use as cathodes in vacuum arc sources

BWXT Y 12 LLC7 citations69