Inventor
TENNEY MICHAEL P
US16 patents
⚠️ This page may combine multiple inventors who share the name “TENNEY MICHAEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
15 patentsUS6630395B1Oct 7, 2003
Methods for fabricating electrical connections to semiconductor structures incorporating low-k dielectric materials
IBM15 citations91
US6858530B2Feb 22, 2005
Method for electrically characterizing charge sensitive semiconductor devices
IBM12 citations82
US6670717B2Dec 30, 2003
Structure and method for charge sensitive electrical devices
IBM13 citations82
US6884641B2Apr 26, 2005
Site-specific methodology for localization and analyzing junction defects in mosfet devices
IBM11 citations73
US6888224B1May 3, 2005
Methods and systems for fabricating electrical connections to semiconductor structures incorporating low-k dielectric materials
IBM5 citations72
US9170273B2Oct 27, 2015
High frequency capacitance-voltage nanoprobing characterization
IBM6 citations71
US8367484B2Feb 5, 2013
Antifuse structure for in line circuit modification
IBM1 citations62
US7993504B2Aug 9, 2011
Backside unlayering of MOSFET devices for electrical and physical characterization
IBM3 citations61
US7371689B2May 13, 2008
Backside unlayering of MOSFET devices for electrical and physical characterization
IBM3 citations61
US6703641B2Mar 9, 2004
Structure for detecting charging effects in device processing
IBM6 citations60
US8368069B2Feb 5, 2013
Antifuse structure for in line circuit modification
IBM0 citations52
US8367483B2Feb 5, 2013
Antifuse structure for in line circuit modification
IBM0 citations52
US8368070B2Feb 5, 2013
Antifuse structure for in line circuit modification
IBM0 citations52
US7015146B2Mar 21, 2006
Method of processing backside unlayering of MOSFET devices for electrical and physical characterization including a collimated ion plasma
IBM0 citations51
US9052338B2Jun 9, 2015
Inert gas delivery system for electrical inspection apparatus
IBM0 citations48