Inventor
COLLISON WENLI
US12 patents
⚠️ This page may combine multiple inventors who share the name “COLLISON WENLI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS9190302B2Nov 17, 2015
System and method for controlling plasma with an adjustable coupling to ground circuit
LAM RES CORP154 citations98
US6257168B1Jul 10, 2001
Elevated stationary uniformity ring design
LAM RES CORP57 citations96
US6229264B1May 8, 2001
Plasma processor with coil having variable rf coupling
LAM RES CORP85 citations94
US6716303B1Apr 6, 2004
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same
LAM RES CORP20 citations92
US6514378B1Feb 4, 2003
Method for improving uniformity and reducing etch rate variation of etching polysilicon
LAM RES CORP36 citations92
US6388383B1May 14, 2002
Method of an apparatus for obtaining neutral dissociated gas atoms
LAM RES CORP28 citations92
US6052176AApr 18, 2000
Processing chamber with optical window cleaned using process gas
LAM RES CORP32 citations92
US7077971B2Jul 18, 2006
Methods for detecting the endpoint of a photoresist stripping process
LAM RES CORP2 citations62
US7105102B2Sep 12, 2006
Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same
LAM RES CORP0 citations52
US6451158B1Sep 17, 2002
Apparatus for detecting the endpoint of a photoresist stripping process
LAM RES CORP1 citations52