Inventor
CHUC KIEN
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHUC KIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS9978564B2May 22, 2018
Chemical control features in wafer process equipment
APPLIED MATERIALS INC106 citations98
US9132436B2Sep 15, 2015
Chemical control features in wafer process equipment
APPLIED MATERIALS INC198 citations98
US10354843B2Jul 16, 2019
Chemical control features in wafer process equipment
APPLIED MATERIALS INC40 citations97
US5212537AMay 18, 1993
Calibration technique for monochromators and spectrophotometers
APPLIED MATERIALS INC30 citations88
US11264213B2Mar 1, 2022
Chemical control features in wafer process equipment
APPLIED MATERIALS INC0 citations62