Inventor

ZOCCHI FABIO

IT10 patents

⚠️ This page may combine multiple inventors who share the name “ZOCCHI FABIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEDIA LARIO SRL

3 patents

US8895946B2Nov 25, 2014

Source-collector modules for EUV lithography employing a GIC mirror and a LPP source

MEDIA LARIO SRL7 citations79

US8344339B2Jan 1, 2013

Source-collector module with GIC mirror and tin rod EUV LPP target system

MEDIA LARIO SRL4 citations59

US8050380B2Nov 1, 2011

Zone-optimized mirrors and optical systems using same

MEDIA LARIO SRL0 citations49

CEGLIO NATALE M

2 patents

US8330131B2Dec 11, 2012

Source-collector module with GIC mirror and LPP EUV light source

CEGLIO NATALE M8 citations80

US9057962B2Jun 16, 2015

Source-collector module with GIC mirror and LPP EUV light source

CEGLIO NATALE M3 citations59

WALLHEAD IAN

1 patent

US8411815B2Apr 2, 2013

Grazing incidence collector for laser produced plasma sources

WALLHEAD IAN8 citations78

LEVESQUE RICHARD A

1 patent

US8258485B2Sep 4, 2012

Source-collector module with GIC mirror and xenon liquid EUV LPP target system

LEVESQUE RICHARD A15 citations77

LEVESQUE RICHARD

1 patent

US8686381B2Apr 1, 2014

Source-collector module with GIC mirror and tin vapor LPP target system

LEVESQUE RICHARD3 citations54

BIANUCCI GIOVANNI

1 patent

US8746975B2Jun 10, 2014

Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography

BIANUCCI GIOVANNI2 citations51

ZOCCHI FABIO

1 patent

US8594277B2Nov 26, 2013

Grazing incidence collector optical systems for EUV and X-ray applications

ZOCCHI FABIO2 citations49