Inventor

STEARNS DANIEL

US9 patents

⚠️ This page may combine multiple inventors who share the name “STEARNS DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULTRATECH INC

3 patents

US9666432B2May 30, 2017

Method and apparatus for forming device quality gallium nitride layers on silicon substrates

ULTRATECH INC6 citations83

US10249491B2Apr 2, 2019

Method and apparatus for forming device quality gallium nitride layers on silicon substrates

ULTRATECH INC0 citations51

US9960036B2May 1, 2018

Method and apparatus for forming device quality gallium nitride layers on silicon substrates

ULTRATECH INC1 citations51

MEDIA LARIO SRL

3 patents

US8895946B2Nov 25, 2014

Source-collector modules for EUV lithography employing a GIC mirror and a LPP source

MEDIA LARIO SRL7 citations79

US9585236B2Feb 28, 2017

Sn vapor EUV LLP source system for EUV lithography

MEDIA LARIO SRL0 citations49

US9609731B2Mar 28, 2017

Systems and methods for synchronous operation of debris-mitigation devices

MEDIA LARIO SRL1 citations46

STEARNS DANIEL

1 patent

US8353126B2Jan 15, 2013

Bee smoker

STEARNS DANIEL3 citations54

BIANUCCI GIOVANNI

1 patent

US8746975B2Jun 10, 2014

Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography

BIANUCCI GIOVANNI2 citations51

GREK BORIS

1 patent

US8731139B2May 20, 2014

Evaporative thermal management of grazing incidence collectors for EUV lithography

GREK BORIS0 citations35