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Inventor
LEVESQUE RICHARD A
US
4 patents
⚠️ This page may combine multiple inventors who share the name “LEVESQUE RICHARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEVESQUE RICHARD A
1 patent
US8258485B2
Sep 4, 2012
Source-collector module with GIC mirror and xenon liquid EUV LPP target system
LEVESQUE RICHARD A
15 citations
77
BELL TELEPHONE LABOR INC
1 patent
US4365156A
Dec 21, 1982
Tunable θ-2θ device
BELL TELEPHONE LABOR INC
16 citations
71
MEDIA LARIO SRL
1 patent
US8344339B2
Jan 1, 2013
Source-collector module with GIC mirror and tin rod EUV LPP target system
MEDIA LARIO SRL
4 citations
59
BIANUCCI GIOVANNI
1 patent
US8746975B2
Jun 10, 2014
Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography
BIANUCCI GIOVANNI
2 citations
51