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Inventor
KATOU KEISUKE
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “KATOU KEISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KATOU KEISUKE
1 patent
US9023578B2
May 5, 2015
Copolymer for lithography and method for evaluating the same
KATOU KEISUKE
2 citations
54
MITSUBISHI RAYON CO
1 patent
US9296842B2
Mar 29, 2016
Polymer for lithography
MITSUBISHI RAYON CO
0 citations
49
YASUDA ATSUSHI
1 patent
US9109060B2
Aug 18, 2015
Method for producing polymer, polymer for lithography, resist composition, and method for producing substrate
YASUDA ATSUSHI
0 citations
45