Inventor

STAMM UWE BRUNO HEINI

DE5 patents

⚠️ This page may combine multiple inventors who share the name “STAMM UWE BRUNO HEINI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LOOPSTRA ERIK ROELOF

3 patents

US9110377B2Aug 18, 2015

Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method

LOOPSTRA ERIK ROELOF5 citations71

US8547525B2Oct 1, 2013

EUV radiation generation apparatus

LOOPSTRA ERIK ROELOF5 citations71

US9091944B2Jul 28, 2015

Source collector, lithographic apparatus and device manufacturing method

LOOPSTRA ERIK ROELOF0 citations40

VAN SCHOOT JAN BERNARD PLECHELMUS

1 patent

US9632419B2Apr 25, 2017

Radiation source

VAN SCHOOT JAN BERNARD PLECHELMUS2 citations68

ASML NETHERLANDS BV

1 patent

US8368040B2Feb 5, 2013

Radiation system and lithographic apparatus

ASML NETHERLANDS BV4 citations61