Inventor
SON HEE-GEUN
KR4 patents
Patents
4 patentsUS9010155B2Apr 21, 2015
Laser annealing apparatus
SAMSUNG DISPLAY CO LTD0 citations49
US9221122B2Dec 29, 2015
Method of controlling a laser beam annealing apparatus to manufacture thin film transistor substrate
SAMSUNG DISPLAY CO LTD0 citations48
US9005998B2Apr 14, 2015
Laser annealing apparatus and method, and display apparatus manufactured by this method
SAMSUNG DISPLAY CO LTD0 citations44
US9194815B2Nov 24, 2015
Apparatus and method for inspecting crystallization
SAMSUNG DISPLAY CO LTD0 citations37