Inventor
KIRCHNER HARALD
DE8 patents
⚠️ This page may combine multiple inventors who share the name “KIRCHNER HARALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
3 patentsUS7760327B2Jul 20, 2010
Reflecting optical element with eccentric optical passageway
ZEISS CARL SMT AG8 citations82
US7448763B2Nov 11, 2008
Optical subassembly and projection objective in semiconductor lithography
ZEISS CARL SMT AG7 citations70
US7428037B2Sep 23, 2008
Optical component that includes a material having a thermal longitudinal expansion with a zero crossing
ZEISS CARL SMT AG1 citations49