Inventor

MAKABE TOSHIYUKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “MAKABE TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US9721822B2Aug 1, 2017

Electrostatic chuck apparatus

TOKYO ELECTRON LTD3 citations71

US9410753B2Aug 9, 2016

Substrate temperature adjusting method and a method of changing the temperature control range of a heater in a substrate processing apparatus

TOKYO ELECTRON LTD5 citations69

US10714370B2Jul 14, 2020

Mounting table and plasma processing apparatus

TOKYO ELECTRON LTD3 citations68

US12165893B2Dec 10, 2024

Substrate processing system and transfer method

TOKYO ELECTRON LTD0 citations50

SASAKI YASUHARU

1 patent

US8981263B2Mar 17, 2015

Electrostatic chuck apparatus

SASAKI YASUHARU15 citations82