Inventor
OKAJO TAKETOSHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OKAJO TAKETOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7582491B2Sep 1, 2009
Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium
TOKYO ELECTRON LTD16 citations82
US9410753B2Aug 9, 2016
Substrate temperature adjusting method and a method of changing the temperature control range of a heater in a substrate processing apparatus
TOKYO ELECTRON LTD5 citations69
US7592569B2Sep 22, 2009
Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded therein
TOKYO ELECTRON LTD1 citations48