Inventor

YASAKA ANTO

JP18 patents

⚠️ This page may combine multiple inventors who share the name “YASAKA ANTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YASAKA ANTO

HITACHI HIGH TECH SCIENCE CORP

Method for fabricating emitter

Repair apparatus

Emitter structure, gas ion source and focused ion beam system

Focused ion beam apparatus with precious metal emitter surface

Method for fabricating emitter

Method for acquiring image and ion beam apparatus

Method for acquiring image and ion beam apparatus

HITACHI HIGH-TECH SCIENCE CORP

Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

Emitter structure, gas ion source and focused ion beam system

Focused ion beam apparatus

Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

SEIKO INSTR INC

Method of stabilizing operation for a liquid metal ion source

Method of correcting a pattern film

SII NANOTECHNOLOGY INC

Photomask correction method using composite charged particle beam, and device used in the correction method

OGAWA TAKASHI

Defect repair apparatus and method for EUV mask using a hydrogen ion beam

YASAKA ANTO

Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa

KOYAMA YOSHIHIRO

Charged particle beam apparatus, thin film forming method, defect correction method and device forming method