Inventor
HIRANO TAICHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “HIRANO TAICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10229819B2Mar 12, 2019
Plasma processing apparatus and probe apparatus
TOKYO ELECTRON LTD41 citations94
US10755894B2Aug 25, 2020
Power supply system
TOKYO ELECTRON LTD40 citations92
US10115567B2Oct 30, 2018
Plasma processing apparatus
TOKYO ELECTRON LTD41 citations92
US9922802B2Mar 20, 2018
Power supply system, plasma etching apparatus, and plasma etching method
TOKYO ELECTRON LTD34 citations92
US11742181B2Aug 29, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD5 citations85
US11476089B2Oct 18, 2022
Control method and plasma processing apparatus
TOKYO ELECTRON LTD7 citations85
US7506610B2Mar 24, 2009
Plasma processing apparatus and method
TOKYO ELECTRON LTD15 citations84
US7494561B2Feb 24, 2009
Plasma processing apparatus and method, and electrode plate for plasma processing apparatus
TOKYO ELECTRON LTD12 citations84
US12165842B2Dec 10, 2024
Control method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US11742182B2Aug 29, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US10056230B2Aug 21, 2018
Power supply system, plasma processing apparatus and power supply control method
TOKYO ELECTRON LTD1 citations50