Inventor
MELI LUCIANA
US7 patents
Patents
7 patentsUS10256320B1Apr 9, 2019
Vertical field-effect-transistors having a silicon oxide layer with controlled thickness
IBM11 citations83
US11906901B2Feb 20, 2024
Alternating copolymer chain scission photoresists
IBM0 citations61
US10998192B2May 4, 2021
Sequential infiltration synthesis extreme ultraviolet single expose patterning
IBM0 citations61
US11194254B2Dec 7, 2021
Lithography process delay characterization and effective dose compensation
IBM0 citations59
US11561481B2Jan 24, 2023
Using E0 exposures for track/cluster monitoring
IBM0 citations58
US10707326B2Jul 7, 2020
Vertical field-effect-transistors having a silicon oxide layer with controlled thickness
IBM0 citations51
US10437951B2Oct 8, 2019
Care area generation by detection optimized methodology
IBM0 citations50