Inventor
KISHIDA SHIGEAKI
JP6 patents
Patents
6 patentsUS6051120AApr 18, 2000
Thin film forming apparatus
NISSIN ELECTRIC CO LTD5 citations61
US7988835B2Aug 2, 2011
Silicon dot forming method and silicon dot forming apparatus
NISSIN ELECTRIC CO LTD2 citations60
US11417752B2Aug 16, 2022
Method for producing thin film transistor
NISSIN ELECTRIC CO LTD0 citations57
US11862431B2Jan 2, 2024
Plasma control system and plasma control program
NISSIN ELECTRIC CO LTD0 citations51
US11328913B2May 10, 2022
Sputtering device
NISSIN ELECTRIC CO LTD0 citations49
US11251020B2Feb 15, 2022
Sputtering apparatus
NISSIN ELECTRIC CO LTD0 citations46