Inventor
NDIEGE NICHOLAS MUGA
US5 patents
Patents
5 patentsUS9847222B2Dec 19, 2017
Treatment for flowable dielectric deposition on substrate surfaces
LAM RES CORP15 citations83
US9916977B2Mar 13, 2018
Low k dielectric deposition via UV driven photopolymerization
LAM RES CORP7 citations82
US9245739B2Jan 26, 2016
Low-K oxide deposition by hydrolysis and condensation
LAM RES CORP14 citations81
US10388546B2Aug 20, 2019
Apparatus for UV flowable dielectric
LAM RES CORP2 citations70
US11270896B2Mar 8, 2022
Apparatus for UV flowable dielectric
LAM RES CORP1 citations60