Inventor
LIU YEN-HAO
TW4 patents
Patents
4 patentsUS11520246B1Dec 6, 2022
Highly efficient automatic particle cleaner method for EUV systems
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12210296B2Jan 28, 2025
Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11953839B2Apr 9, 2024
Highly efficient automatic particle cleaner method for EUV systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12420313B2Sep 23, 2025
Onsite cleaning system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47