Inventor

PRANATHARTHIHARAN BALASUBRAMANIAN S

US25 patents

⚠️ This page may combine multiple inventors who share the name “PRANATHARTHIHARAN BALASUBRAMANIAN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PRANATHARTHIHARAN BALASUBRAMANIAN S

IBM

Stacked transistors with different channel widths

Fin cut during replacement gate formation

Cutting fins and gates in CMOS devices

Co-integration of different fin pitches for logic and analog devices

Fin cut during replacement gate formation

POC process flow for conformal recess fill

POC process flow for conformal recess fill

POC process flow for conformal recess fill

Semiconductor device having reduced contact resistance

Gate-all-around monolithic stacked field effect transistors having multiple threshold voltages

Backside power rails and power distribution network for density scaling

Stacked transistors with different channel widths

Fin cut during replacement gate formation

Pitch split patterning for semiconductor devices

Stacked FETS with non-shared work function metals

Selective deposition and cross-linking of polymeric dielectric material

Etch back and film profile shaping of selective dielectric deposition

POC process flow for conformal recess fill

Semiconductor device having reduced contact resistance

Integrating gate-cuts and single diffusion break isolation post-RMG using low-temperature protective liners

Reducing bending in parallel structures in semiconductor fabrication

TESSERA LLC

Stacked transistors with different channel widths

APPLIED MATERIALS INC

Integratead wet clean for bevel treatments

ADEIA SEMICONDUCTOR SOLUTIONS LLC

Stacked transistors with different channel widths

TESSERA INC

Stacked transistors with different channel widths