Inventor
D'ELIA PETER
US3 patents
Patents
3 patentsUS12506019B2Dec 23, 2025
Wafer chuck designs and methods for retaining a processing liquid on a surface of a semiconductor wafer
TOKYO ELECTRON LTD0 citations47
US12103052B2Oct 1, 2024
Method and single wafer processing system for processing of semiconductor wafers
TOKYO ELECTRON LTD0 citations46
US12288698B2Apr 29, 2025
Methods for retaining a processing liquid on a surface of a semiconductor substrate
TOKYO ELECTRON LTD0 citations44