Inventor

Anggraini Sri Ayu

JP3 patents

Patents

3 patents

US12454491B2Oct 28, 2025

Nitride piezoelectric body and MEMS device using same

AIST0 citations59

US11999615B2Jun 4, 2024

Nitride piezoelectric body and MEMS device using same

AIST0 citations59

US11968902B2Apr 23, 2024

Piezoelectric body and MEMS device using same

AIST0 citations59