Inventor
LAMONT JR LAWRENCE T
US12 patents
⚠️ This page may combine multiple inventors who share the name “LAMONT JR LAWRENCE T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
9 patentsUS5281320AJan 25, 1994
Wafer coating system
VARIAN ASSOCIATES46 citations95
US4909314AMar 20, 1990
Apparatus for thermal treatment of a wafer in an evacuated environment
VARIAN ASSOCIATES71 citations95
US4743570AMay 10, 1988
Method of thermal treatment of a wafer in an evacuated environment
VARIAN ASSOCIATES61 citations95
US4680061AJul 14, 1987
Method of thermal treatment of a wafer in an evacuated environment
VARIAN ASSOCIATES118 citations95
US4756815AJul 12, 1988
Wafer coating system
VARIAN ASSOCIATES46 citations92
US4457825AJul 3, 1984
Sputter target for use in a sputter coating source
VARIAN ASSOCIATES35 citations92
US5024747AJun 18, 1991
Wafer coating system
VARIAN ASSOCIATES27 citations89
US4414086ANov 8, 1983
Magnetic targets for use in sputter coating apparatus
VARIAN ASSOCIATES25 citations81
US4673480AJun 16, 1987
Magnetically enhanced sputter source
VARIAN ASSOCIATES13 citations73
MACHINE TECHNOLOGY INC
3 patentsUS5114556AMay 19, 1992
Deposition apparatus and method for enhancing step coverage and planarization on semiconductor wafers
MACHINE TECHNOLOGY INC63 citations95
US4756810AJul 12, 1988
Deposition and planarizing methods and apparatus
MACHINE TECHNOLOGY INC152 citations95
US4717461AJan 5, 1988
System and method for processing workpieces
MACHINE TECHNOLOGY INC396 citations93