Inventor
FUKUYAMA RYOOJI
JP24 patents
⚠️ This page may combine multiple inventors who share the name “FUKUYAMA RYOOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
23 patentsUS5868854AFeb 9, 1999
Method and apparatus for processing samples
HITACHI LTD67 citations96
US5276386AJan 4, 1994
Microwave plasma generating method and apparatus
HITACHI LTD66 citations96
US5007981AApr 16, 1991
Method of removing residual corrosive compounds by plasma etching followed by washing
HITACHI LTD106 citations96
US5556714ASep 17, 1996
Method of treating samples
HITACHI LTD68 citations95
US5380397AJan 10, 1995
Method of treating samples
HITACHI LTD35 citations95
US6537415B2Mar 25, 2003
Apparatus for processing samples
HITACHI LTD17 citations92
US5200017AApr 6, 1993
Sample processing method and apparatus
HITACHI LTD38 citations92
US6165377ADec 26, 2000
Plasma etching method and apparatus
HITACHI LTD9 citations74
US5952245ASep 14, 1999
Method for processing samples
HITACHI LTD7 citations74
US5900162AMay 4, 1999
Plasma etching method and apparatus
HITACHI LTD12 citations74
US6537417B2Mar 25, 2003
Apparatus for processing samples
HITACHI LTD6 citations73
US6328845B1Dec 11, 2001
Plasma-processing method and an apparatus for carrying out the same
HITACHI LTD8 citations73
US6329298B1Dec 11, 2001
Apparatus for treating samples
HITACHI LTD8 citations73
US6254721B1Jul 3, 2001
Method and apparatus for processing samples
HITACHI LTD6 citations73
US6036816AMar 14, 2000
Apparatus for processing a sample having a metal laminate
HITACHI LTD8 citations73
US4971651ANov 20, 1990
Microwave plasma processing method and apparatus
HITACHI LTD15 citations72
US7014787B2Mar 21, 2006
Etching method of organic insulating film
HITACHI LTD2 citations63
US6793833B2Sep 21, 2004
Etching method of organic insulating film
HITACHI LTD2 citations63
US6077788AJun 20, 2000
Method and apparatus for processing samples
HITACHI LTD5 citations63
US6989228B2Jan 24, 2006
Method and apparatus for processing samples
HITACHI LTD3 citations62
US6656846B2Dec 2, 2003
Apparatus for processing samples
HITACHI LTD2 citations62
US7396481B2Jul 8, 2008
Etching method of organic insulating film
HITACHI LTD0 citations52
US7132293B2Nov 7, 2006
Method and apparatus for processing samples
HITACHI LTD1 citations52