Inventor
KAWANABE TAKAO
JP6 patents
Patents
6 patentsUS4463073AJul 31, 1984
Method and apparatus for redressing defective photomask
HITACHI LTD59 citations95
US4795720AJan 3, 1989
Method for producing semiconductor devices and cutting fuses
HITACHI LTD48 citations92
US4609566ASep 2, 1986
Method and apparatus for repairing defects on a photo-mask pattern
HITACHI LTD53 citations91
US5094539AMar 10, 1992
Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same
HITACHI LTD22 citations90
US5432608AJul 11, 1995
Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same
HITACHI LTD11 citations71
US5260771ANov 9, 1993
Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same
HITACHI LTD8 citations71