Inventor

TAKEDA YOSHIHUMI

JP31 patents

Patents

31 patents

US5942367AAug 24, 1999

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

SHINETSU CHEMICAL CO91 citations99

US5352564AOct 4, 1994

Resist compositions

SHINETSU CHEMICAL CO57 citations96

US6312869B1Nov 6, 2001

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

SHINETSU CHEMICAL CO20 citations93

US6114462ASep 5, 2000

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

SHINETSU CHEMICAL CO28 citations93

US4948763AAug 14, 1990

Resist composition with polymeric dissolution inhibitor and alkali soluble resin

SHINETSU CHEMICAL CO39 citations92

US5529888AJun 25, 1996

Water-soluble film forming composition

SHINETSU CHEMICAL CO22 citations92

US5393815AFeb 28, 1995

Silazane-based, heat resistant, dielectric coating compositions

SHINETSU CHEMICAL CO23 citations92

US4657991AApr 14, 1987

Precursor composition of silicon carbide

SHINETSU CHEMICAL CO25 citations92

US4604367AAug 5, 1986

Method for the preparation of an inorganic fiber containing silicon, carbon, boron and nitrogen

SHINETSU CHEMICAL CO37 citations92

US5254411AOct 19, 1993

Formation of heat-resistant dielectric coatings

SHINETSU CHEMICAL CO20 citations82

US4550151AOct 29, 1985

Organoborosilicon polymer and a method for the preparation thereof

SHINETSU CHEMICAL CO23 citations82

US4847345AJul 11, 1989

Process for manufacturing organic silazane polymers and ceramics therefrom

SHINETSU CHEMICAL CO22 citations81

US4771118ASep 13, 1988

Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers

SHINETSU CHEMICAL CO20 citations81

US6335141B1Jan 1, 2002

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

SHINETSU CHEMICAL CO13 citations74

US5691112ANov 25, 1997

Sulfonium salt and chemically amplified positive resist composition

SHINETSU CHEMICAL CO9 citations74

US5633409AMay 27, 1997

Tristertbutoxyphenyl sulfonium tosylate compound

SHINETSU CHEMICAL CO10 citations74

US4870035ASep 26, 1989

Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers

SHINETSU CHEMICAL CO7 citations72

US5580936ADec 3, 1996

Method for preparing partially tert-butoxylated poly(p-hydroxystyrene)

SHINETSU CHEMICAL CO4 citations63

US5296418AMar 22, 1994

Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer

SHINETSU CHEMICAL CO4 citations63

US5210058AMay 11, 1993

Method for preparing organic silazane polymers and method for preparing ceramics from the polymers

SHINETSU CHEMICAL CO3 citations63

US5200371AApr 6, 1993

Method for preparing organic silazane polymers and method for preparing ceramics from the polymers

SHINETSU CHEMICAL CO3 citations63

US5075474ADec 24, 1991

Method for preparing hexamethyl cyclotrisilazane

SHINETSU CHEMICAL CO5 citations63

US5041515AAug 20, 1991

Methods for preparing polytitanocarbosilazane polymers and ceramics therefrom

SHINETSU CHEMICAL CO6 citations63

US5183875AFeb 2, 1993

Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer

SHINETSU CHEMICAL CO0 citations52

US5157096AOct 20, 1992

Method and apparatus for preparing organic silazane polymer and method for preparing inorganic fibers

SHINETSU CHEMICAL CO0 citations52

US5008348AApr 16, 1991

Infusibilization of organic silazane polymers

SHINETSU CHEMICAL CO1 citations52

TAKEDA YOSHIHUMI

Patents

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

Resist compositions

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

Preparation of hollow ceramic fibers

Process for manufacturing organic silazane polymers and ceramics therefrom

Polymers and chemically amplified positive resist compositions

Polymers and chemically amplified positive resist compositions

Anti-reflective coating composition

Resist composition with polymeric dissolution inhibitor and alkali soluble resin

Water-soluble film forming composition

Silazane-based, heat resistant, dielectric coating compositions

Precursor composition of silicon carbide

Method for the preparation of an inorganic fiber containing silicon, carbon, boron and nitrogen

Formation of heat-resistant dielectric coatings

Organoborosilicon polymer and a method for the preparation thereof

Process for manufacturing organic silazane polymers and ceramics therefrom

Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

Sulfonium salt and chemically amplified positive resist composition

Tristertbutoxyphenyl sulfonium tosylate compound

Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers

Method for preparing partially tert-butoxylated poly(p-hydroxystyrene)

Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer

Method for preparing organic silazane polymers and method for preparing ceramics from the polymers

Method for preparing organic silazane polymers and method for preparing ceramics from the polymers

Method for preparing hexamethyl cyclotrisilazane

Methods for preparing polytitanocarbosilazane polymers and ceramics therefrom

Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer

Method and apparatus for preparing organic silazane polymer and method for preparing inorganic fibers

Infusibilization of organic silazane polymers