Inventor
HEFFERON GEORGE J
US5 patents
⚠️ This page may combine multiple inventors who share the name “HEFFERON GEORGE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6057080AMay 2, 2000
Top antireflective coating film
IBM86 citations96
US5744537AApr 28, 1998
Antireflective coating films
IBM72 citations96
US4908298AMar 13, 1990
Method of creating patterned multilayer films for use in production of semiconductor circuits and systems
IBM108 citations95
US5609989AMar 11, 1997
Acid scavengers for use in chemically amplified photoresists
IBM47 citations94