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Inventor
MIDORIKAWA RYOTARO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “MIDORIKAWA RYOTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US8896210B2
Nov 25, 2014
Plasma processing apparatus and method
TOKYO ELECTRON LTD
10 citations
79
US7842189B2
Nov 30, 2010
Treatment device, treatment device consumable parts management method, treatment system, and treatment system consumable parts management method
TOKYO ELECTRON LTD
6 citations
57
AGILENT TECHNOLOGIES INC
1 patent
US6265717B1
Jul 24, 2001
Inductively coupled plasma mass spectrometer and method
AGILENT TECHNOLOGIES INC
95 citations
92