Inventor
NZEADIBE IHI
US5 patents
⚠️ This page may combine multiple inventors who share the name “NZEADIBE IHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6159297ADec 12, 2000
Semiconductor process chamber and processing method
APPLIED MATERIALS INC90 citations95
US5789322AAug 4, 1998
Low volume gas distribution assembly for a chemical downstream etch tool
APPLIED MATERIALS INC26 citations92
US5728260AMar 17, 1998
Low volume gas distribution assembly and method for a chemical downstream etch tool
APPLIED MATERIALS INC18 citations92
US6264852B1Jul 24, 2001
Substrate process chamber and processing method
APPLIED MATERIALS INC38 citations90