Inventor

DEHE ALFONS

DE154 patents

⚠️ This page may combine multiple inventors who share the name “DEHE ALFONS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DEHE ALFONS

INFINEON TECHNOLOGIES AG

Micromechanical sensors and methods of manufacturing same

Micromechanical sensors and methods of manufacturing same

MEMS microphone with low pressure region between diaphragm and counter electrode

Sound transducer structure and method for manufacturing a sound transducer structure

Support structure and method of forming a support structure

MEMS acoustic transducer, MEMS microphone, MEMS microspeaker, array of speakers and method for manufacturing an acoustic transducer

MEMS sensor structure for sensing pressure waves and a change in ambient pressure

MEMS microphone with low pressure region between diaphragm and counter electrode

MEMS device and MEMS vacuum microphone

Photoacoustic gas sensor device and a method for analyzing gas

Plate, transducer and methods for making and operating a transducer

Pressure sensor and method for operating a pressure sensor

Membrane and method for the production of the same

MEMS-sensor

Capacitive MEMS device, capacitive MEMS sound transducer, method for forming a capacitive MEMS device, and method for operating a capacitive MEMS device

Apparatus and method for in-situ calibration of a photoacoustic sensor

MEMS component and production method for a MEMS component

MEMS component and production method for a MEMS component

Double-membrane MEMS component and production method for a double-membrane MEMS component

MEMS microphone

Microelectromechanical microphone

MEMS sensors, methods for providing same and method for measuring a fluid constituent

Microelectromechanical transducer

Photoacoustic gas sensor device and a method for analyzing gas

Sensitivity compensation for capacitive MEMS device

System and method for a variable flow transducer

Photo-acoustic gas sensor module having light emitter and detector units

Sound transducer with housing and MEMS structure

MEMS microphone, apparatus comprising a MEMS microphone and method for fabricating a MEMS microphone

System and method for an integrated transducer and temperature sensor

Plate, transducer and methods for making and operating a transducer

MEMS device

Sound transducer structure and method for manufacturing a sound transducer structure

MEMS device

Micromechanical digital loudspeaker

System and method for packaged MEMS device having embedding arrangement, MEMS die, and grille

System and method for a MEMS transducer

Dynamic pressure sensor

Comb MEMS device and method of making a comb MEMS device

Device with MEMS structure and ventilation path in support structure

MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer

MEMS device having a back plate with elongated protrusions

DEHE ALFONS

Adjustable ventilation openings in MEMS structures

MEMS structure with adjustable ventilation openings

Micro electrical mechanical system with bending deflection of backplate structure

Micromechanical digital loudspeaker

Electrostatic loudspeaker with membrane performing out-of-plane displacement

Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions

KLEIN WOLFGANG

Micromechanical sound transducer having a membrane support with tapered surface

HSU SHU-TING

Sound transducer with interdigitated first and second sets of comb fingers