Inventor
DE WEERDT ROBRECHT EMIEL MARIA
BE5 patents
Patents
5 patentsUS6831285B2Dec 14, 2004
Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV15 citations82
US7126666B2Oct 24, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV12 citations81
US7161657B2Jan 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations80
US6885117B2Apr 26, 2005
Magnetic actuator under piezoelectric control
ASML NETHERLANDS BV2 citations60
US7280182B2Oct 9, 2007
Lithographic apparatus, device manufacturing method and computer program
ASML NETHERLANDS BV0 citations39