Inventor
SHIH CHINNWEN
US3 patents
Patents
3 patentsUS6912082B1Jun 28, 2005
Integrated driver electronics for MEMS device using high voltage thin film transistors
PALO ALTO RES CT INC72 citations96
US6973722B2Dec 13, 2005
Release height adjustment of stressy metal devices by annealing before and after release
PALO ALTO RES CT INC20 citations92
US7129181B2Oct 31, 2006
Sub-resolution gaps generated by controlled over-etching
PALO ALTO RES CT INC4 citations58