Inventor
CHEN PO-JEN
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHEN PO-JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6245654B1Jun 12, 2001
Method for preventing tungsten contact/via plug loss after a backside pressure fault
TAIWAN SEMICONDUCTOR MFG105 citations96
US7148120B2Dec 12, 2006
Method of forming improved rounded corners in STI features
TAIWAN SEMICONDUCTOR MFG11 citations73
US6174795B1Jan 16, 2001
Method for preventing tungsten contact plug loss after a backside pressure fault
TAIWAN SEMICONDUCTOR MFG7 citations72